SIZE QUANTIZATION EFFECTS IN THIN ALUMINIUM FILMS |
| 3 | |
| 2010 |
| scientific article | 539.216 + 538.975 | ||
| 61-67 | two-dimensional structure, quantum size effects, tunnelling, size quantization, current-voltage characteristic, conductivity |
| The dependence of Al film resistance on thickness and the current-voltage characteristics of tunnel Al - Al2O3 - Al
structures were investigated. The Al films were obtained by film deposition on a cold substrate. The films were
thinned by the method of ion-plasma etching up to a thickness of ~ 50 - 100 A. Oscillations of dI/dU (U) curve were
observed on thinned tunnel structures which can be attributed to the size quantization of the electron spectrum in thin
Al films. |
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