MECHANICAL MODELING OF THE NANOSTRUCTURES FORMED DURING HETEROEPITAXY OF THIN FILMS |
| 4 | |
| 2011 |
| scientific article | 539.3 | ||
| 2623-2625 |
| A review of the results obtained by the author and related to modeling of the stress-strain state inside and outside 3D heterostructures formed during heteroepitaxial growth of thin films is given. Two alternative approaches for solving the corresponding problems are considered: the multipole expansion method and the finite element method. |
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