Radiation-induced formation of silicon nitride in silicon by consecutive irradiation with colliding nitrogen and argon ion beams |
3 | |
2007 |
SOLID-STATE PHYSICS |
539.1.04 | |||
34-40 |
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Radiation-induced formation of silicon nitride in silicon by consecutive irradiation with colliding nitrogen and argon ion beams |
3 | |
2007 |
SOLID-STATE PHYSICS |
539.1.04 | |||
34-40 |
![]() |