Главная страница
russian   english
16+
<< back

Title of Article

RESULTS OF REPLACEMENT OF SERIAL ALLOY FABRICATION TECHNOLOGY OF INSB PHOTODIODES BY ION IMPLANTATION PLANAR TECHNOLOGY


Issue
5
Date
2009

Article type
scientific article
UDC
621.383.4:546
Pages
48-54
Keywords
InSb, implantation, noise power spectral density, alloy technology


Authors
Astakhov V.P.
OAO «Moskovskiy zavod «Sapfir»

Gindin P.D.
OAO «Moskovskiy zavod «Sapfir»

Gulyaev A.M.
Moskovskiy energeticheskiy institut (TU)

Zinovev V.G.
Moskovskaya gosakademiya tonkoy khimicheskoy tekhnologii (TU) im. M.V. Lomonosova

Karpov V.V.
OAO «Moskovskiy zavod «Sapfir»

Maksimov A.D.
Moskovskaya gosakademiya tonkoy khimicheskoy tekhnologii (TU) im. M.V. Lomonosova

Miroshnikova I.N.
Moskovskiy energeticheskiy institut (TU)


Abstract
Photodiodes (PD) with «large» circular and annular areas having common centre have been fabricated using the ion implantation planar technology and their photoelectric characteristics have been studied. At the same time, PDs fabricated by the serial alloy technology have been studied. In both cases, the photoelectric parameters have been measured according to GOST 17772-88 standard. Volt-ampere characteristics and noise power spectral densities of both types of PDs have also been measured. The replacement of the serial alloy fabrication technology by the ion implantation planar one has been found to improve PD threshold parameters by the factor of 2 to 2.5.

File (in Russian)