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Title of Article

INVESTIGATION OF MULTIELEMENT LOW-SIZE ION-IMPLANTED PHOTODIODE STRUCTURES ON InSb CRYSTALS BY ELECTRON BEAM INDUCED CURRENT METHOD


Issue
6
Date
 2009

Article type
 scientific article
UDC
621.383.4:546
Pages
56-61
Keywords
InSb, implantation, induced current, anodic oxidation, postimplantation annealing


Authors
Astakhov V.P.
OAO «Moskovskiy zavod «Sapfir»

Zinovev V.G.
Moskovskaya gosakademiya tonkoy khimicheskoy tekhnologii (TU) im. M.V. Lomonosova

Karpov V.V.
OAO «Moskovskiy zavod «Sapfir»

Maksimov A.D.
Moskovskaya gosakademiya tonkoy khimicheskoy tekhnologii (TU) im. M.V. Lomonosova

Yakimov E.B.
Institut problem tekhnologii mikroelektroniki i osobochistykh materialov RAN


Abstract
Multielement planar photodiode structures produced on InSb crystals using Be

File (in Russian)

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