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Title of Article

MACROKINETIC ANALYSIS OF PLASMA-CHEMICAL SYNTHESIS OF TELLURIUM AND TUNGSTEN OXIDES FROM THEIR CHLORIDES


Issue
1
Date
2010

Article type
scientific article
UDC
537.525:542.943:546.24/.78
Pages
108-115
Keywords
macrokinetic model of plasma-chemical deposition, tellurium and tungsten oxides, optical fiber preforms


Authors
Kutin A.M.
Institut khimii vysokochistykh veschestv RAN, N. Novgorod

Polyakov V.S.
Institut khimii vysokochistykh veschestv RAN, N. Novgorod

Lobanov A.S.
Institut khimii vysokochistykh veschestv RAN, N. Novgorod

Churbanov M.F.
Institut khimii vysokochistykh veschestv RAN, N. Novgorod


Abstract
Macrokinetic regularities of TeO2-WO3 plasma condensation from the corresponding element chlorides have been revealed in relation with the thermal conditions of the process. This has been done on the basis of the developed mathematical model of plasma-chemical deposition on the inner surface of the supporting tube (reactor) identified by experimental data. A virtually complete deposition of tellurium and tungsten oxides from the corresponding chlorides has been observed in the zone of coaxial-cylindrical capacitive discharge under the determined set of flow reagents ratios, pressure, temperature regime of the reactor and the level of plasma chemical action. With the optimum level of plasma chemical action and subsequent thermotreatment of the residue, the required optical fiber preforms can be obtained

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