50 YEARS OF ION IMPLANTATION PHYSICS RESEARCH AT THE PHYSICO-TECHNICAL RESEARCH INSTITUTE OF UNN |
| 5 | |
| 2010 |
| ION IMPLANTATION |
| scientific article | 537.311.33: 539.12.04 | ||
| 250-259 | ion implantation, fundamental research, generalization of results, relation to current problems |
| The most important results of fundamental research carried out at the Physico-Technical Research Institute of UNN since 1961 in the field of ion implantation and their relation to topical problems of the last decade are reported. Based on the generalization of these results, some new conclusions are made and published for the first time. |
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