Вестник Нижегородского университета им. Н.И. Лобачевского. Серия: Социальные науки

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Title of Article

SOME FEATURES OF THE CHANGE IN ELECTRONIC AND OPTICAL PROPERTIES OF YTTRIA STABILIZED ZIRCONIA IRRADIATED WITH Au IONS AT LOW FLUENCE

Issue	5
Date	2010

Article type	scientific article	UDC	538.958:539.534.9
Pages	283-287	Keywords	yttria-stabilized zirconia (YSZ), thin films, RF magnetron sputtering method, ion implantation, Au ions, tunnel electron microscopy, atomic force microscopy, nanosized metallic particles

Authors

Gorshkov Oleg NikolaevichNauchno-issledovatelskiy fiziko-tekhnicheskiy institut NNGU im. N.I. Lobachevskogo
Antonov Ivan NikolaevichNauchno-issledovatelskiy fiziko-tekhnicheskiy institut NNGU im. N.I. Lobachevskogo
Shenina Mariya EvgenevnaNauchno-issledovatelskiy fiziko-tekhnicheskiy institut NNGU im. N.I. Lobachevskogo
Antonov Dmitriy AleksandrovichNizhegorodskiy gosuniversitet im. N.I. Lobachevskogo
Dudin Aleksandr YurevichNauchno-issledovatelskiy fiziko-tekhnicheskiy institut NNGU im. N.I. Lobachevskogo
Mikhaylov Aleksey NikolaevichNauchno-issledovatelskiy fiziko-tekhnicheskiy institut NNGU im. N.I. Lobachevskogo
Kasatkin Aleksandr PavlovichNauchno-issledovatelskiy fiziko-tekhnicheskiy institut NNGU im. N.I. Lobachevskogo

Abstract

Electrophysical properties are studied of yttria stabilized zirconia (YSZ) thin films (with a thickness of 12 nm) deposited on the silicon substrates by the RF magnetron sputtering method and irradiated with Au ions at 60 keV average energy and a fluence of 2.5

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