THE ANALYSIS OF ELASTIC STRAINS IN AN INHOMOGENEOUS NANO-DIMENSIONAL SEMI-CONDUCTOR FILM ON A SUBSTRATE |
| 4 | |
| 2011 |
| scientific article | 539.3 | ||
| 405-406 |
| Distribution of the concentration of Ge in pyramidal islands on the surface of a semi-conductor film, consisting of a SiGe alloy is investigated. A three-dimensional model of Stranski?Krastanov islands is constructed. The elastic strains has been analyzed using a finite elements method. To calculate the distribution of Ge, approximating formulas and an iterative algorithm are used. |
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