A microwave plasma-chemical reactor has been simulated using the ANSYS CFX software package, which allows one to carry out parametric investigations and to increase the information content of the processes studied. The investigation results on gas-dynamic and heat-exchange processes in silicon tetrachloride plasma-chemical conversion are presented. The studies have been conducted using modern computer technologies of hydro- and gas-dynamics. It has been possible to get velocity and temperature fields in detail, as well as the gas consumption in the plasma area and to determine the gas heating energy consumption, the gas temperature and the residence time in the reaction zone.
|
