METROLOGICAL ASSURANCE OF ANALYTICAL RESEARCH METHODS TO STUDY SOLID-STATE NANOSYSTEMS |
| 6 | |
| 2013 |
| scientific article | 53.043 + 538.911 + 006.9 | ||
| 41-46 | nanosystems, nanometrology, analytics, electron spectroscopy, atomic force microscopy, measurement techniques |
| Modern scientific approaches to determine nanosystem parameters require the development of common standards and methods for unifying research in the field of nanoindustry. The article considers key aspects of metrological assur-ance of modern analytical techniques to study chemical composition by electron spectroscopy and perform geometric characterization of nanostructures by atomic force microscopy. The main problems of nanometrology are defined and their solutions are proposed. The basic result of the work is the attestation of geometrical parameters measurement tech-niques of surface nanoislands on the basis of A3B5, A4 semiconductors and the determination of element mass fractions in GexSi1-x solid solutions and in SiCo and MnAs spintron nanosystems. |
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