A review of experimental and theoretical studies of ferroelectric epitaxial nanoscale pellicles of complex oxides is given. Due to the peculiarities of pellicle lattice coupling with the substrate lattice in the framework of technological process they acquire properties that are unique and different from the usual ferroelectric properties. The dependence of the mechanical and the electric properties of epitaxial ferroelectric pellicles on their thickness plays a special role. Due to a special selection of the thickness of pellicles to achieve the specified device parameters, pellicles with unique properties are obtained. The possibilities and prospects of using nanoscale epitaxial ferroelectric pellicles of complex oxides in the production of strain sensors, micro- and nano-electro-mechanical systems (MEMS, NEMS) and acoustic-electronic devices are discussed.
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