ANALYSIS OF THE EFFECT OF THE TEMPERATURE FIELD ON THE DEFORMATION OF A LAYERED MICRO-ACCELEROMETER |
| 4 | |
| 2011 |
| scientific article | 539.3 | ||
| 2330-2332 |
| The coupled electro-thermo-mechanical problem of deformation of a layered sensitive element of a micro-accelerometer is mathematically formulated and numerically analyzed using the finite element method. The effect of electrostatic forces and temperature deformations on the parameters and a target signal of the gage are evaluated. |
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