IONIC SPUTTERING EFFECT ON AU NANOPARTICLE FORMATION BY ION IMPLANTATION IN YTTRIA-STABILIZED ZIRCONIA FILMS |
1 | |
2014 |
scientific article | 538.975 | ||
80-83 | magnetron sputtering method, stabilized zirconia, ion implantation, transmission electron microscopy, metal nanoparticles, sputtering yield |
Yttria-stabilized zirconia films implanted with multicharged Au ions at an average energy of 160 keV and the fluence of 4 |