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Title of Article

IONIC SPUTTERING EFFECT ON AU NANOPARTICLE FORMATION BY ION IMPLANTATION IN YTTRIA-STABILIZED ZIRCONIA FILMS


Issue
1
Date
2014

Article type
scientific article
UDC
538.975
Pages
80-83
Keywords
magnetron sputtering method, stabilized zirconia, ion implantation, transmission electron microscopy, metal nanoparticles, sputtering yield


Authors
Koryazhkina M.N.
Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo

Gorshkov O.N.
Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo

Pavlov D.A.
Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo

Antonov I.N.
Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo

Kasatkin A.P.
Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo

Malekhonova N.V.
Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo

Shenina M.E.
Nizhegorodskiy gosuniversitet im. N.I. Lobachevskogo


Abstract
Yttria-stabilized zirconia films implanted with multicharged Au ions at an average energy of 160 keV and the fluence of 4

File (in Russian)