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Title of Article

CALCULATION OF UNIFORMITY OF A MULTICOMPONENT GAS MIXTURE IN THE COURSE OF DEPOSITION OF DOPED LAYERS OF CADMIUM- MERCURY- TELLURIUM SOLID SOLUTION BY THE MOCVD METHOD


Issue
4
Date
2014

Article type
scientific article
UDC
51.73, 533.273
Pages
402-408
Keywords
multicomponent gas mixture, flow nonuniformity, vertical reactor, numerical experiment, MOCVD (metal-organic chemical vapor deposition) method


Authors
Shabarova L.V.
Institut khimiivysokochistykh veschestv RAN im. G.G. Devyatykh, N. Novgorod

Kirillov Yu.P.
Institut khimiivysokochistykh veschestv RAN im. G.G. Devyatykh, N. Novgorod

Moiseev A.N.
Institut khimiivysokochistykh veschestv RAN im. G.G. Devyatykh, N. Novgorod


Abstract
The article presents the results of computational experiments to study the unsteady flow of a multicomponent gas mixture (hydrogen, mercury vapor, DMC, DET, DIPTe, dopants) in a vertical flow reactor on the basis of a three-dimensional mathematical model that takes into account the convective heat and mass transfer, compressibility, viscosity and thermal conductivity of components as well as turbulence in the gas flow. We have determined the degree of gas flow nonuniformity near the substrate as dependent on the geometry of the input components and the feed rate of the doping component.

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